Patent · US Active

Method for manufacturing a micromechanical component

US9365417B2 · kind B2 · utility

0Cited by

0References

9Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Thomas Mayer · Reutlingen, DE
Heribert Weber · Leverkusen, DE
Jens Frey · Echterdingen, DE

Key dates

Filing date	Nov 25, 2014
Grant date	Jun 14, 2016
Priority date	—
Expiry date	Nov 25, 2034

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/0109
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for manufacturing a micromechanical component includes the following sequential steps: a first material layer including a first joining partner being applied to a first wafer; a second material layer including a second joining partner being applied to a second wafer; a micromechanical structure being created in the first wafer by gas phase etching with the aid of a gaseous etching medium which is applied to the first joining partner; the first and second wafers being joined in such a way that they are in contact at least in some areas; and the first and second joining partners being heated to be integrally joined to form a connecting layer, a eutectic joining material being formed in the connecting layer from the first joining partner and the second joining partner.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.