Waferstart processes and systems for integrated circuit fabrication

US9367882B2 · kind B2 · utility

Assignee

• GlobalFoundries Inc. · KY

Inventors

• Tony Genenncher · Dresden, DE
• Stephan Puelm · Dresden, DE
• Michael Foerster · Newtown Square, US
• Juergen Sieberg · Dresden, DE

Key dates

• Filing date: Aug 7, 2012
• Grant date: Jun 14, 2016
• Expiry date: May 23, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/30
• WIPO field: IT methods for management
• WIPO sector: Electrical engineering

Abstract

A waferstart process for integrated circuit fabrication includes entering order information from requested wafers into a computer through a data input interface of the computer. A container is provided including supplied wafers and having a machine-readable medium associated therewith. The machine-readable medium is encoded with wafer data pertaining to the supplied wafers. The wafer data is entered from the machine-readable medium associated with the container into the computer. The order information and the wafer data are compared within the computer to create a verified data set in the computer upon the computer determining that the supplied wafers in the container correspond to the requested wafers in the order information. The verified data set is stored in a storage medium within the computer. The supplied wafers are transferred from the container to a front opening unified pod after creating the verified data set.