Patent · US Active

Apparatus and method for defect detection including patch-to-patch comparisons

US9367911B2 · kind B2 · utility

3Cited by
4References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 13, 2012
Grant dateJun 14, 2016
Priority date
Expiry dateOct 16, 2033

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG06T2207/30148
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A system receives, based on processing of an inspected frame of an inspected image generated by collecting signals indicative of a pattern on an article, at least one candidate defect location in the inspected frame. The system defines a candidate patch within the inspected frame. The candidate patch is associated with the candidate defect location. The system identifies at least one similar patch in the inspected frame using a predefined similarity criterion and determines whether a defect exists at the candidate defect location based on a comparison of at least a portion of the candidate patch with at least a corresponding portion of the at least one similar patch.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.