Integrated circuit comprising a thermal conductivity based gas sensor

US9372166B2 · kind B2 · utility

Assignee

• AMS INTERNATIONAL AG · CH

Inventors

• Roel Daamen · Herkenbosch, NL
• Aurelie Humbert · Brussels, BE
• Pascal Bancken · Opwijk, BE

Key dates

• Filing date: Oct 7, 2013
• Grant date: Jun 21, 2016
• Expiry date: Aug 21, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N33/0032
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An integrated circuit and a method of making the same. The integrated circuit includes a semiconductor substrate. The integrated circuit also includes a relative humidity sensor on the substrate. The relative humidity sensor includes a first sensor electrode, a second sensor electrode, and a humidity sensitive layer covering the first and second electrodes. The integrated circuit further includes a thermal conductivity based gas sensor on the substrate. The thermal conductivity based gas sensor has an electrically resistive sensor element located above the humidity sensitive layer.