Final focus assembly for extreme ultraviolet light source
US9374882B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 12, 2013 |
| Grant date | Jun 21, 2016 |
| Priority date | — |
| Expiry date | Dec 12, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B17/0615
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An extreme ultraviolet light system includes a target material delivery system configured to produce a target material; and a beam delivery system that is configured to receive an amplified light beam emitted from a drive laser system and to direct the amplified light beam toward a target location that receives the target material. The beam delivery system includes a final focus assembly that focuses the amplified light beam at a focal location to enable interaction between the amplified light beam and the target material to cause the target material to be converted into a plasma that emits extreme ultraviolet light. The final focus assembly includes at least one transmissive optical element having at least one curved surface through which the amplified light beam travels; and at least one reflective optical element having at least one curved surface on which the amplified light beam is reflected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.