Systems and methods for handling substrates at below dew point temperatures

US9377423B2 · kind B2 · utility

Assignee

• Cascade Microtech, Inc. · US

Inventors

• Botho Hirschfeld · Dresden, DE
• Axel Becker · Altrip, DE

Key dates

• Filing date: Dec 27, 2013
• Grant date: Jun 28, 2016
• Expiry date: Oct 29, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2862
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Disclosed systems and methods for testing a device under test (DUT) with a probe system are selected to test a DUT at a temperature below the dew point of the ambient environment surrounding the probe system. Probe systems include a measurement chamber configured to isolate a cool, dry testing environment and a measurement chamber door configured to selectively isolate the internal volume of the measurement chamber. When a DUT, that is or is included on a substrate, is tested at a low temperature, systems and methods are selected to heat the substrate in a dry environment, at least partially isolated from the measurement chamber, to at least a temperature above the dew point and/or the frost point of the ambient environment.