Transducer structure and method for MEMS devices
US9377487B2 · kind B2 · utility
1Cited by
92References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 20, 2013 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | May 8, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49007
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.