Semiconductor device and method of fabricating the same
US9379114B2 · kind B2 · utility
7Cited by
1References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 31, 2012 |
| Grant date | Jun 28, 2016 |
| Priority date | — |
| Expiry date | Dec 31, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B12/31
Abstract
Provided are a semiconductor device and a method of fabricating the same. The semiconductor device may include storage node pads disposed adjacent to each other between word lines but spaced apart from each other by an isolation pattern. Accordingly, it is possible to prevent a bridge problem from being caused by a mask misalignment. This enables to improve reliability of the semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.