Reinforcement ring for carrier head
US9381613B2 · kind B2 · utility
6Cited by
15References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 24, 2014 |
| Grant date | Jul 5, 2016 |
| Priority date | — |
| Expiry date | Jun 29, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B41/061
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A reinforcement ring is for placement in a carrier head to abut an inner surface of a perimeter portion of a flexible membrane. The reinforcement ring includes a substantially vertical cylindrical portion, a first flange projecting inwardly from the bottom of the cylindrical portion, and a second flange projecting outwardly from a bottom of the cylindrical portion. The second flange projects downwardly at a non-zero angle from vertical.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.