Spectral detector or laser scanning microscope having variable filtration using spatial color separation

US9389120B2 · kind B2 · utility

Assignee

• Carl Zeiss Microscopy GmbH · DE

Inventors

• Jakow Konradi · Erfurt, DE
• Daniel Schwedt · Weimar, DE
• Enrico Geissler · Jena, DE
• Günter Rudolph · Jork, DE
• Hans-Jürgen Dobschal · Kleinromstedt, DE

Key dates

• Filing date: Aug 28, 2010
• Grant date: Jul 12, 2016
• Expiry date: May 12, 2032

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/22
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Laser scanning microscope or spectral detector having a detection beam path and first imaging optics which image spectrally dispersed sample light in a Fourier plane such that the individual spectral components of the sample light are spatially separated from one another therein. A micromirror arrangement is provided in this plane, and a spectrally selective change in direction of the detection beam is carried out by controlling the micromirrors, where a useful light component of the detection beam arrives on a detector. At least one second micromirror arrangement and a 1:1 imaging of the first micromirror arrangement in the second micromirror arrangement is provided. Alternatively, the same micromirror arrangement is passed at least twice, where, in the light path between the first pass and second pass, a spatial offset of the light beam of at least the first pass and second pass is generated on the micromirror arrangement by optical means.