Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus
US9396910B2 · kind B2 · utility
1Cited by
22References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2015 |
| Grant date | Jul 19, 2016 |
| Priority date | — |
| Expiry date | Nov 20, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A heat transfer plate useful in a showerhead electrode assembly of a capacitively coupled plasma processing apparatus. The heat transfer plate includes independently controllable gas volumes which may be pressurized to locally control thermal conductance between a heater member and a cooling member such that uniform temperatures may be established on a plasma exposed surface of the showerhead electrode assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.