Vacuum treatment apparatus
US9396981B2 · kind B2 · utility
11Cited by
3References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 27, 2011 |
| Grant date | Jul 19, 2016 |
| Priority date | — |
| Expiry date | Dec 27, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3321
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
To reduce pumping time of a vacuum treatment chamber served by a transport arrangement in a transport chamber the vacuum treatment chamber is split into a workpiece treatment compartment and a pumping compartment in mutual free flow communication and arranged opposite each other with respect to a movement path of the transport arrangement serving the vacuum treatment chamber. The pumping compartment allows a pumping port to have a flow cross-section area that is freely selectable independently from the geometry of the treatment compartment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.