Patent · US Active

Microelectromechanical component and method for testing a microelectromechanical component

US9399572B2 · kind B2 · utility

5Cited by

2References

20Claims

0Family size

Assignee

ELMOS SEMICONDUCTOR SE · DE

Inventors

Bernd Burchard · Dortmund, DE
Michael Doelle · Munich, DE

Key dates

Filing date	Jan 27, 2012
Grant date	Jul 26, 2016
Priority date	—
Expiry date	Jan 27, 2033

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0264
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

The microelectromechanical component has a semiconductor substrate (1), which has a cavity (2a) formed in the semiconductor substrate. The cavity is covered by a reversibly deformable membrane (2). A sensor (17) for detecting a deformation of the membrane (2) is formed within the region of the membrane (2). A test actuator (28, 29, 30) for deforming the membrane (2) for testing purposes is also arranged within the region of the membrane (2). Finally, the microelectromechanical component has an evaluation and activation unit (41) connected to the sensor (17) and the test actuator (28, 29, 30) for activating the test actuator (28, 29, 30) in order to deform the membrane (2) as a test and for evaluating a measurement signal of the sensor (17) as a sensor detection of a deformation of the membrane (2) as a result of the activation of the test actuator (28, 29, 30).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.