Transient measurements of mass flow controllers
US9400004B2 · kind B2 · utility
11Cited by
79References
8Claims
0Family size
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Key dates
| Filing date | Nov 29, 2011 |
| Grant date | Jul 26, 2016 |
| Priority date | — |
| Expiry date | Dec 13, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/8158
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus to measure the transient response of a mass flow controller (MFC). The size of a variable orifice, upstream of the MFC, is controlled such that the pressure between the orifice and the MFC is held constant during the entire time that the MFC is going through its transient response. The known relationship between the size of the orifice and the flow through it allows a determination of the transient response of the MFC.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.