Support for semiconductor substrate
US9401299B2 · kind B2 · utility
2Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2011 |
| Grant date | Jul 26, 2016 |
| Priority date | — |
| Expiry date | Nov 28, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A moveable semiconductor substrate support includes a control device receiving data from one or more sensors and providing control signals to one or more actuators. The control device is coupled to and moves with the moveable substrate support to facilitate flexible and complex operation of the substrate support itself.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.