Patent · US Active

Inductive structure formed using through silicon vias

US9406738B2 · kind B2 · utility

12Cited by
35References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 20, 2011
Grant dateAug 2, 2016
Priority date
Expiry dateFeb 4, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15311
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An inductor for an integrated circuit can include a first turn comprising a first through silicon via (TSV) coupled to a second TSV. The inductor can include a third TSV coupled to the second TSV.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.