Scanning probe microscope
US9410983B2 · kind B2 · utility
1Cited by
2References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2014 |
| Grant date | Aug 9, 2016 |
| Priority date | — |
| Expiry date | Feb 28, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A scanning probe microscope includes a stage on which a sample is mounted, a probe configured to measure a characteristic of the sample, and a controller configured to move the probe and the stage relative to each other along a scanning trajectory during measurement of the characteristic of the sample. The scanning trajectory includes a plurality of linear segments, wherein each pair of adjacent linear segments form an angle that is 90 degrees or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.