Patent · US Active

High-resolution amplitude contrast imaging

US9412558B2 · kind B2 · utility

7Cited by

7References

20Claims

0Family size

Assignees

UNIVERSITEIT ANTWERPEN · BE
FEI Company · US

Inventors

Dirk Van Dyck · Aartselaar, BE
Uwe Lucken · Aurich, DE
Holger Stark · Allmersbach im Tal, DE
Sara Bals · Antwerpen, BE

Key dates

Filing date	Feb 14, 2014
Grant date	Aug 9, 2016
Priority date	—
Expiry date	Feb 14, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2614
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for performing high resolution electron microscopy of a soft matter object is described. The method comprises irradiating a soft matter object using an electron microscope having a spherical aberration correction with a substantially constant transfer function in a frequency band of thermal diffuse scattered electrons scattered at the soft matter object. The method comprises detecting the thermal diffuse scattered (TDS) electrons scattered at the soft matter, and using the detected thermal diffuse scattered electrons for deriving therefrom an image of the soft matter object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.