Compact hazardous gas line distribution enabling system single point connections for multiple chambers
US9416919B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 6, 2014 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Feb 2, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86083
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A system and method for safely enabling the delivery of at least one gas line to at least one point of use in a facility by using a vacuum system and a gas delivery system wherein the gas delivery system is housed within the vacuum system is disclosed herein. An interior volume of a conduit containing therein at least one gas line is maintained at reduced pressure as one end of the gas line connects to a gas source and another end of the gas line connects to a point of use. By using a conduit to enclose the individual gas lines and using a single feed line for each gas, the embodiments disclosed herein reduce the number of individual gas lines that need to be run through a facility.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.