System and a method for automatic recipe validation and selection
US9418413B1 · kind B1 · utility
4Cited by
8References
19Claims
0Family size
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Key dates
| Filing date | Jul 5, 2010 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Dec 28, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system, a non-transitory computer program product and a method for selecting an inspection recipe, the method includes: (i) obtaining an image of a structural element of the semiconductor device; (ii) calculating multiple types of distances between the image of the structural element and each of a plurality of reference images obtained by applying a plurality of inspection recipes; and (iii) automatically selecting at least one selected inspection recipe out of the plurality of inspection recipes based on values of the multiple types of distances.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.