MIM capacitors with improved reliability
US9418999B2 · kind B2 · utility
6Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 28, 2014 |
| Grant date | Aug 16, 2016 |
| Priority date | — |
| Expiry date | Oct 28, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/696
Abstract
A capacitor and methods for forming the same are provided. The method includes forming a bottom electrode; treating the bottom electrode in an oxygen-containing environment to convert a top layer of the bottom electrode into a buffer layer; forming an insulating layer on the buffer layer; and forming a top electrode over the insulating layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.