Substrate holder
US9421617B2 · kind B2 · utility
13Cited by
157References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2012 |
| Grant date | Aug 23, 2016 |
| Priority date | — |
| Expiry date | Feb 24, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/247
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A rotary chuck adapted to hold a substrate. The rotary chuck has a rotatable chuck portion and an edge grip having a movable grip member movably mounted to the rotatable chuck portion, the moveable grip member being substantially free moving so that rotation of the rotating chuck portion causes the moveable grip member to move in a plane substantially aligned with a surface of the substrate to engage the substrate in a engaged position. A resilient element is coupled to the moveable grip member, the resilient member biasing the grip member to a disengaged position.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.