Method for resuming a wire sawing process of a workpiece after an unplanned interruption

US9427888B2 · kind B2 · utility

Assignee

• Siltronic AG · DE

Inventor

• Peter Wiesner · Simbach, DE

Key dates

• Filing date: Nov 22, 2013
• Grant date: Aug 30, 2016
• Expiry date: Mar 11, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B28D1/08
• WIPO field: Other special machines
• WIPO sector: Mechanical engineering

Abstract

A method resumes an interrupted process for sawing a workpiece into wafers using a wire saw that includes advancing a wire web into existing sawing kerfs of the workpiece with a forward movement of the sawing wire with a first speed in the presence of a liquid sawing medium until the wire web or workpiece has reached a position corresponding to the interruption of the wire sawing process. The sawing wire is moved in defined time intervals by a forward movement of a particular length with a second speed and a backward movement of another length with a third speed, where the backward length is less than the forward length and the forward and backward movement correspond to a cycle. The wire length that is unwound during the forward movements is increased until the length during the forward movement corresponds to the length of the forward movement before the interruption.