Direct electrostatic assembly with capacitively coupled electrodes
US9431283B2 · kind B2 · utility
11Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2013 |
| Grant date | Aug 30, 2016 |
| Priority date | — |
| Expiry date | Jun 20, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/95
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A system and method manipulate micro objects. A field generator is configured to generate a force field varying in both space and time to manipulate the micro objects on a substrate. The substrate is not permanently affixed to the field generator and allows the force field to pass through the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.