Patent · US Active

Rule clean layer marker

US9431349B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

GlobalFoundries Inc. · KY

Inventors

Peter Völk · Dresden, DE
Michael Otto · Dresden, DE
Christoph Rainer Gerhard Mueller · Dresden, DE

Key dates

Filing date	Nov 7, 2014
Grant date	Aug 30, 2016
Priority date	—
Expiry date	Nov 7, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A method and apparatus for including human readable text in a semiconductor design which is both machine readable for printing on a wafer and human readable from the wafer are disclosed that are design rule clean depending on the layer to be printed. Embodiments include receiving a semiconductor design including a layer marker, the layer marker including human readable text; transforming the human readable text to a binary representation; transforming the binary representation to a machine readable two-dimensional barcode; and printing the two-dimensional barcode on a semiconductor wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.