Retainer ring
US9434047B2 · kind B2 · utility
2Cited by
9References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2012 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Jun 3, 2034 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B41/067
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A retainer ring for chemical-mechanical polishing or other processes includes an outside ring and an inside ring that is attached to the outside ring. The inside ring is softer than the outside ring in hardness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.