Branched siloxanes and methods for synthesis
US9434750B2 · kind B2 · utility
0Cited by
4References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2015 |
| Grant date | Sep 6, 2016 |
| Priority date | — |
| Expiry date | Apr 8, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/31055
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The present invention describes branched and functionalized siloxanes and methods for making such compounds. The compounds have a variety of uses. One preferred application is as novel planarizing material for lithography, in which case functionalized branched siloxane, such as an epoxy-modified branched siloxane is particularly useful.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.