Variable spacing four-point probe pin device and method

US9435826B2 · kind B2 · utility

Assignee

• KLA-TENCOR CORPORATION · US

Inventors

• Walter H. Johnson · Salem, US
• Jianou Shi · State College, US
• Lansheng Dong · Shanghai, CN
• Haijing Peng · Shanghai, CN
• Xianghua Liu · Zhejiang, CN
• Jiazhou Jin · Shanghai, CN
• Zhuoxian Zhang · Shanghai, CN
• Nanchang Zhu · Shanghai, CN

Key dates

• Filing date: May 6, 2013
• Grant date: Sep 6, 2016
• Expiry date: Feb 8, 2035

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R1/06733
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A continuous variable spacing probe pin device, including first and second probe pins. The first and second probe pins are configured to measure a property of a conductive layer. In a first configuration, the first and second probe pins include respective first portions arranged to contact the conductive layer to measure the property. In a second configuration, the first and second probe pins include respective second portions arranged to contact the conductive layer to measure the property. A first area for each respective first portion is different from a second area for each respective second portion.