Generating root cause candidates for yield analysis
US9443051B2 · kind B2 · utility
5Cited by
5References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2013 |
| Grant date | Sep 13, 2016 |
| Priority date | — |
| Expiry date | Aug 22, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06F2119/18
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Aspects of the invention relate to yield analysis techniques for generating root cause candidates for yield analysis. With various implementations of the invention, points of interest are first identified in a layout design. Next, regions of interest are determined for the identified points of interest. Next, one or more properties are extracted from the regions of interest. Based at least on the one or more properties, diagnosis reports of failing devices fabricated according to the layout design are analyzed to identify probable root causes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.