Carbon nanotube or graphene based pressure switch
US9455105B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2011 |
| Grant date | Sep 27, 2016 |
| Priority date | — |
| Expiry date | Apr 5, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49105
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention describes systems and methods for providing a carbon or graphene based pressure switch. An exemplary embodiment of the present invention includes a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the cavity; a conductive membrane disposed above the cavity and adapted to deflect towards the bottom conductor upon an applied pressure; an elastic, insulating layer disposed between the conductive membrane and the bottom conductor; and a switching element adapted to activate upon electrical communication between the conductive membrane and the bottom conductor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.