Micromachined 3-axis accelerometer with a single proof-mass
US9455354B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Sep 18, 2011 |
| Grant date | Sep 27, 2016 |
| Priority date | — |
| Expiry date | Mar 9, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0848
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This document discusses, among other things, an inertial measurement system including a device layer including a single proof-mass 3-axis accelerometer, a cap wafer bonded to a first surface of the device layer, and a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3-axis accelerometer. The single proof-mass 3-axis accelerometer can be suspended about a single, central anchor, and can include separate x, y, and z-axis flexure bearings, wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor and the z-axis flexure is not symmetrical about the single, central anchor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.