Patent · US Active

Vibration isolation system with support divided into sections, and method for controlling same

US9458908B2 · kind B2 · utility

0Cited by

6References

13Claims

0Family size

Assignee

Integrated Dynamics Engineering GmbH · DE

Inventors

Shatat-Herres Moneer · Raunheim, DE
Mario Pabst · Östringen, DE
Peter A. Kropp · Nersingen, DE

Key dates

Filing date	Aug 19, 2014
Grant date	Oct 4, 2016
Priority date	—
Expiry date	Mar 10, 2035

Classification

Technology area (CPC F)Mechanical Engineering; Lighting; Heating
CPC primaryF16F15/0232
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

A vibration isolation system which comprises a support divided into a plurality of rigid sections on which a displaceable stage is arranged. The sections are arranged on pneumatic bearings, and the pneumatic bearings of the individual sections are controlled independently from each other and based on the position of the displaceable stage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.