Guide plate for probe card
US9459287B2 · kind B2 · utility
0Cited by
3References
9Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Mar 12, 2014 |
| Grant date | Oct 4, 2016 |
| Priority date | — |
| Expiry date | Oct 30, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07357
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a guide plate for a probe card including a silicon substrate including a surface and a through-hole, an edge part of the through-hole, and a curved-face part. The through-hole is configured to guide a probe and includes an inner wall face. The edge part of the through-hole is constituted by the surface of the silicon substrate and the inner wall face of the through-hole. The curved-face part is formed on the edge part and formed of a silicon dioxide film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.