FIB-SEM array tomography

US9464995B2 · kind B2 · utility

Assignees

• Carl Zeiss Microscopy GmbH · DE
• RUPRECHT - KARLS - UNIVERSITÄT HEIDELBERG · DE

Inventors

• Martin Edelmann · Aalen, DE
• Alexandra F. Elli · Oberkochen, DE
• Andreas Schertel · Aalen, DE
• Rasmus Schroeder · Heidelberg, DE

Key dates

• Filing date: Jul 24, 2014
• Grant date: Oct 11, 2016
• Expiry date: Jul 24, 2034

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Methods and devices for magnified imaging of three-dimensional samples are disclosed. The methods include imaging sample sections of a sample section series using a first particle-optical device. Coordinates of the imaged sample point are acquired and stored in such a way that the coordinates of the imaged sample point can be associated with the respective image of this sample point. The method also includes selecting a volume of interest (VOI), and transmitting the coordinates of the selected VOI to a second particle-optical device. In addition, the method includes imaging the selected VOI by means of the second particle-optical device. A plurality of planes of a sample section are imaged in order to obtain a 3D image of the selected VOI.