Heat treatment furnace and heat treatment apparatus
US9466515B2 · kind B2 · utility
1Cited by
16References
2Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Jun 19, 2012 |
| Grant date | Oct 11, 2016 |
| Priority date | — |
| Expiry date | Jul 30, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A heat treatment furnace includes: a processing vessel configured to accommodate therein at least one object to be processed; a cylindrical heat insulating member covering a periphery of the processing vessel; and a heater disposed along an inner circumferential surface of the heat insulating member. The heater includes strip-shaped corrugated heater elements disposed along the inner circumferential surface of the heat insulating member, each of the heater elements having valley portions protruding outward and mountain portions protruding inward.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.