Purification system with manifold assembly and removable filter cassette

US9468872B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• Marc Laverdiere · Wakefield, US
• Hirokazu Kuwabara · Yokohama, JP
• Koichi Kurata · Yonezawa, JP
• John P. Puglia · Townsend, US
• Ben Mai Pak Lee · Pelham, US
• Louis Barrows, Jr. · Billerica, US
• Kalyan Madhavaram · Lowell, US
• Dmitri Menn · Marblehead, US
• J. Karl Niermeyer · Tyngsborough, US
• Craig Wallace Martland · Salem, US

Key dates

• Filing date: Sep 30, 2013
• Grant date: Oct 18, 2016
• Expiry date: Sep 30, 2033

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49826
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

The present disclosure relates to modular purification systems using removable purifier cassettes for purifying liquids including, for example, liquids used in semiconductor manufacturing. A purification system may include a removable purifier cassette having a purifier inlet port and a purifier outlet port, and a manifold assembly. The manifold assembly can include a plurality of connection systems to that provide manifold ports to provide fluid to/from the cassette. In some embodiments, the connection systems may use connection nuts that can provide 360 degrees of thread engagement with less than 360 degrees of rotation.