Method and system for use of binary spatial filters
US9470637B2 · kind B2 · utility
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14References
19Claims
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Key dates
| Filing date | Feb 24, 2015 |
| Grant date | Oct 18, 2016 |
| Priority date | — |
| Expiry date | Apr 25, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/068
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.