Semiconductor device capable of probe test
US9470745B2 · kind B2 · utility
1Cited by
3References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 8, 2014 |
| Grant date | Oct 18, 2016 |
| Priority date | — |
| Expiry date | Jan 7, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2886
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor device includes a normal pad and a first monitoring unit suitable for monitoring whether a bunker is formed in the normal pad based on an inherent resistance component of the normal pad during a probe test.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.