Method for reduction of stiction while manipulating micro objects on a surface
US9473047B2 · kind B2 · utility
1Cited by
4References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2013 |
| Grant date | Oct 18, 2016 |
| Priority date | — |
| Expiry date | Sep 15, 2034 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2224/95
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system and method reduce stiction while manipulating micro objects on a surface. The system and method employed a field generator configured to generate a driving force at a frequency and amplitude to at least partially overcome stiction between the micro objects and the surface. The field generator is further configured to generate a manipulation force to manipulate the micro objects on the surface in two dimensions. The manipulation force is spatially programmable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.