MEMS device mechanism enhancement for robust operation through severe shock and acceleration
US9476712B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2013 |
| Grant date | Oct 25, 2016 |
| Priority date | — |
| Expiry date | Aug 23, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical systems (MEMS) device comprises at least one proof mass configured to have a first voltage and a motor motion in a first horizontal direction. At least one sense plate is separated from the proof mass by a sense gap, with the sense plate having an inner surface facing the proof mass and a second voltage different than the first voltage. A set of stop structures are on the inner surface of the sense plate and are electrically isolated from the sense plate. The stop structures are configured to prevent contact of the inner surface of the sense plate with the proof mass in a vertical direction. The stop structures have substantially the same voltage as that of the proof mass, and are dimensioned to minimize energy exchange upon contact with the proof mass during a shock or acceleration event.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.