EMS device having flexible support posts
US9477076B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2014 |
| Grant date | Oct 25, 2016 |
| Priority date | — |
| Expiry date | Dec 9, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G5/003
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having one or more flexible support posts. In one aspect, the EMS device includes a substrate, a stationary electrode over the substrate, one or more flexible support posts over the substrate, and a movable electrode over the stationary electrode and supported by the one or more flexible support posts. The movable electrode is configured to move across a gap between the movable electrode and the stationary electrode upon electrostatic actuation, where the one or more flexible support posts include a first organic material and can be configured to compress to permit the movable electrode to move across the gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.