Wynne-Dyson optical system with variable magnification
US9488811B2 · kind B2 · utility
0Cited by
30References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 26, 2014 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Apr 29, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70241
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A 1× Wynne-Dyson optical system for microlithography having a variable magnification is disclosed. The 1× Wynne-Dyson optical system has first and second prisms, and a positive lens group that includes a split lens having first and second split lens elements that reside adjacent the first and second prisms, respectively. The first and second split lens elements are axially movable to change the magnification by up to about 500 parts per million. An adjustable positive lens group for a 1× Wynne-Dyson optical system is also disclosed, wherein the positive lens group allows for small changes in the optical system magnification.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.