Asymmetrical chamber configuration
US9490152B2 · kind B2 · utility
5Cited by
18References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 29, 2012 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Aug 6, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/6416
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A production tool includes a chamber, a heater in the chamber, and a pumping outlet on a side of the heater. A pumping liner is in the chamber and encircling the heater. The pumping liner and the heater have a first gap therebetween and a second gap therebetween. The second gap is different from the first gap, and the second gap is farther away from the first pumping outlet than the first gap.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.