Mechanical alignment of substrates to a mask
US9490153B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 3, 2014 |
| Grant date | Nov 8, 2016 |
| Priority date | — |
| Expiry date | Jan 22, 2035 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49895
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A plurality of masks is attached to the underside of a mask frame. This attachment is made such that each mask can independently move relative to the mask frame in three directions. This relative movement allows each mask to adjust its position to align with respective alignment pins disposed on a working surface. In one embodiment, each mask is attached to the mask frame using fasteners, where the fasteners have a shaft with a diameter smaller than the diameter of the mounting hole disposed on the mask. A bias element may be used to allow relative movement between the mask and the mask frame in the vertical direction. Each mask may also have kinematic features to mate with the respective alignment pins on the working surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.