Patent · US Active

Semiconductor processing

US9490157B2 · kind B2 · utility

4Cited by
63References
7Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 31, 2009
Grant dateNov 8, 2016
Priority date—
Expiry dateSep 5, 2034

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/68785
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Semiconductor processing and equipment are disclosed. The semiconductor equipment and processing provide semiconductor wafers with reduced defects.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.