Patent · US Active

Signal distribution in integrated circuit using optical through silicon via

US9496447B2 · kind B2 · utility

4Cited by
5References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 2, 2015
Grant dateNov 15, 2016
Priority date
Expiry dateJul 2, 2035

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/50
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An optical through silicon via is formed in a silicon substrate of an integrated circuit. A photo detector is formed within the integrated circuit and is optically coupled to a first side of the optical through silicon via. A light generating source optically coupled to a second side of the optical through silicon via is provided. The photo detector is configured to receive a light, generated by the light generating source, propagating through the optical through silicon via. The light, generated by the light generating source, is controlled by a signal generated by a signal generating source.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.