Method of manufacturing flexible piezoelectric structures
US9502638B2 · kind B2 · utility
4Cited by
5References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2012 |
| Grant date | Nov 22, 2016 |
| Priority date | — |
| Expiry date | May 17, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49124
- WIPO fieldPharmaceuticals
- WIPO sectorChemistry
Abstract
A method of making a flexible piezoelectric structure is disclosed. A piezoelectric film is deposited by film deposition on a planar substrate. A biocompatible flexible substrate is contacted with the piezoelectric film. The piezoelectric film and biocompatible flexible substrate are separated from the planar substrate, and the piezoelectric film remaining is attached to the biocompatible flexible substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.