Method and apparatus for generating a proof-mass drive signal
US9503295B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 6, 2012 |
| Grant date | Nov 22, 2016 |
| Priority date | — |
| Expiry date | Nov 6, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04L27/125
- WIPO fieldDigital communication
- WIPO sectorElectrical engineering
Abstract
A drive-mode oscillator module generates at least one proof-mass drive signal for use within a micro-electro-mechanical system (MEMS) device. The drive-mode oscillator module comprises at least one gain control component arranged to receive at least one proof-mass motion measurement signal, and to generate a digital modulation control signal based at least partly on the at least one proof-mass motion measurement signal, and at least one modulation component arranged to receive the digital amplitude modulation control signal, and to output at least one proof-mass drive signal. The at least one modulation component is arranged to digitally modulate the at least one proof-mass drive signal based at least partly on the received digital amplitude modulation control signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.