X-ray inspection device, inspection method, and X-ray detector
US9506876B2 · kind B2 · utility
2Cited by
1References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 12, 2012 |
| Grant date | Nov 29, 2016 |
| Priority date | — |
| Expiry date | May 22, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2223/652
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The X-ray inspection device includes: an X-ray source with a focal spot size greater than the diameter of a defect for irradiating a sample with X-rays; an X-ray TDI detector arranged near the sample and having long pixels in a direction parallel to the scanning direction of the sample for detecting the X-rays emitted by the X-ray source and passing through the sample as an X-ray transmission image; and a defect-detecting unit for detecting defects based on the X-ray transmission image detected by the X-ray TDI detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.