System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing
US9506947B2 · kind B2 · utility
2Cited by
9References
18Claims
0Family size
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Key dates
| Filing date | Nov 24, 2014 |
| Grant date | Nov 29, 2016 |
| Priority date | — |
| Expiry date | Nov 24, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/48
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.